温度和钎料对CU6Sn5在(110)Cu单晶上生长行为的影响

C. Dong, M. Shang, Yingli Guo, Xiangxu Chen, J. Zhang, Changlong Dong, Haoran Ma, Haitao Ma
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引用次数: 0

摘要

集成电子元件的封装互连是由界面金属间化合物(IMC)实现的。同时,在先进的3D封装中,微凸点的尺寸缩小到几十微米,将导致IMC的过度生长,UBM中包含的晶粒数量急剧减少,这对焊点的可靠性提出了新的挑战。在这种情况下,许多关于在焊料/Cu单晶界面产生的IMC生长的研究已经被报道。本文研究了不同焊料(Sn、Sn- 2ag、Sn- 3ag和(110)Cu单晶)在不同温度(230℃、250℃、300℃)下界面上IMC的生长情况。利用扫描电镜(SEM)和电子背散射衍射(EBSD)分别对Cu6Sn5的形貌和取向进行了表征。结果表明:在(110)Cu上形成的CU6Sn5在较低温度下呈蜗杆型,在较高温度下有向小面型转变的趋势;此外,回流温度对Cu6Sn5取向的形成也有影响。随着Ag含量的增加,CU6Sn5的粗化速率加快。研究结果对控制微焊点的取向和提高微焊点的可靠性具有重要意义。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Significant Effect of Temperature and Solders on The Growth Behavior of CU6Sn5 on (110) Cu Single Crystal
The package interconnect in integrated electronic components is realized by Interfacial intermetallic compounds (IMC). Meanwhile, the downsizing of µ-bumps to tens of microns in advanced 3D packaging will result in the overgrowth of IMC and the number of grains contained in UBM decreased sharply, which bring new challenge for the reliability of solder joints. For this condition, numerous researches about the growth of IMC generated at the solder/Cu single crystal interface have been reported. For this paper, the growth of IMC at the interface between different solder, i.e., Sn, Sn-2Ag, Sn-3Ag, and (110) Cu single crystal at different temperature, i.e., 230°C, 250°C, 300°C, were investigated. Scanning electron microscope (SEM) and electron backscattered diffraction (EBSD) was used to characterize the morphology and orientation of Cu6Sn5, respectively. Results shows that the CU6Sn5 formed on (110) Cu exhibit worm type at lower temperature and were tends to transform into facet type at higher temperature. Furthermore, the reflow temperature make a difference in the formation of Cu6Sn5 orientation. Besides, the coarsening rate of CU6Sn5 was promoted following the increase of the Ag. The results have a significant meaning in controlling the orientation and improving the reliability of micro solder joints.
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