Jia-Lin Wu, C. Kao, Hua-Ching Chien, Tzung-Kuen Tsai, Chih-Yuan Lee, Chien-Wei Liao, Chung-Yu Chou, M. Yang
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Retention Reliability Improvement of SONOS Non-volatile Memory with N2O Oxidation Tunnel Oxide
The reliability characteristics of polysilicon-oxide-nitride-oxide -silicon (SONOS) devices with different thin tunnel oxides are studied. The tunnel oxynitride growth in a pure N2O ambient with high temperature has better performance than in a dry oxidation with N2 annealing treatment including leakage current, programming speed, read disturb and retention. Besides, the surface roughness and interface states between tunnel oxide and Si substrate are also observed by atomic force microscope (AFM) technique and charge-pumping method to evaluate interfacial nitrogen incorporation. The results show that the reliability of data retention obtained a significant improvement while maintaining good programming/erase performance and can provide a straightforward way of reliability improvement for future flash memory application
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