光透明非导电衬底上金刚石生长的刺激

The Fourth International Conference on Advanced Semiconductor Devices and Microsystem Pub Date : 2002-12-16 DOI:10.1109/ASDAM.2002.1088515

M. Kadlecíková, J. Breza, M. Veselý, V. Luptáková, F. Balon, A. Vojacková, J. Král, J. Janı́k, A. Kromka

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引用次数: 0

摘要

采用热丝CVD技术，在经过金刚石颗粒播种和交流偏置预处理的蓝宝石和玻璃衬底上沉积了金刚石层。用拉曼光谱对金刚石层的质量进行了评价。通过检测不同形式碳的不同拉曼带，证实了不同质量的金刚石层。

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Stimulation of diamond growth on optically transparent non-conductive substrates

Diamond layers have been deposited by hot filament CVD on sapphire and glass substrates pre-treated by diamond grain seeding and by AC biasing. The quality of diamond layers has been evaluated by Raman spectroscopy. Diamond layers of different quality have been obtained as confirmed by detecting various Raman bands attributable to different forms of carbon.

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The Fourth International Conference on Advanced Semiconductor Devices and Microsystem

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