沉积时间对脉冲激光沉积法制备ZnO薄膜性能的影响

{"title":"沉积时间对脉冲激光沉积法制备ZnO薄膜性能的影响","authors":"W. Putri, N. Yudasari, R. P. Putra, M. A. Anugrah, B. Kang","doi":"10.1063/5.0106362","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":130419,"journal":{"name":"THE INTERNATIONAL CONFERENCE ON ADVANCED MATERIAL AND TECHNOLOGY (ICAMT) 2021","volume":"137 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Effect of deposition time on the properties of ZnO films fabricated by pulsed laser deposition\",\"authors\":\"W. Putri, N. Yudasari, R. P. Putra, M. A. Anugrah, B. Kang\",\"doi\":\"10.1063/5.0106362\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":130419,\"journal\":{\"name\":\"THE INTERNATIONAL CONFERENCE ON ADVANCED MATERIAL AND TECHNOLOGY (ICAMT) 2021\",\"volume\":\"137 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"THE INTERNATIONAL CONFERENCE ON ADVANCED MATERIAL AND TECHNOLOGY (ICAMT) 2021\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1063/5.0106362\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"THE INTERNATIONAL CONFERENCE ON ADVANCED MATERIAL AND TECHNOLOGY (ICAMT) 2021","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1063/5.0106362","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}