一种提取金属薄膜导热系数的新技术

2011 Proceedings of the European Solid-State Device Research Conference (ESSDERC) Pub Date : 2011-10-13 DOI:10.1109/ESSDERC.2011.6044164

Zhaowang Zong, Z. Qiu, Ran Liu

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引用次数: 0

摘要

利用瞬态电-热耦合模拟研究了3ω测量中频率相关的热响应。此外，利用量化Cahill模型偏差程度的热流比m(ω)提取加热条本身的导热系数，将3ω方法的能力扩展到高导热薄膜。

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A novel technique for extraction of thermal conductivity in metallic thin films

The frequency-dependent thermal response in 3ω measurement is investigated using transient electro-thermal coupling simulations. Furthermore, the heat flow ratio m(ω), quantifying the deviation degree of Cahill's model, is exploited for extraction of the thermal conductivity of the heater strip itself, which extends the capability of 3ω method to high-thermal-conductivity thin films.

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2011 Proceedings of the European Solid-State Device Research Conference (ESSDERC)

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