{"title":"Bragg反射层表面粗糙度对微波固体谐振器特性的影响","authors":"T. Tanskaya, V. N. Zima, A. Kozlov","doi":"10.1109/SIBCON.2015.7147233","DOIUrl":null,"url":null,"abstract":"The bulk acoustic wave resonator with the acoustic Bragg reflector is considered. The materials for the Bragg reflector layers are chosen. These materials are molybdenum for the high-impedance acoustic layers and aluminum for the low-impedance ones. The surface roughness of the molybdenum and aluminum thin-film layers are investigated. The influence of the surface roughness of these layers on the admittance and the quality factor of the acoustic wave resonator with the Bragg reflector is considered.","PeriodicalId":395729,"journal":{"name":"2015 International Siberian Conference on Control and Communications (SIBCON)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":"{\"title\":\"The influence of surface roughness of Bragg reflector layers on characteristics of microwave solidly mounted resonator\",\"authors\":\"T. Tanskaya, V. N. Zima, A. Kozlov\",\"doi\":\"10.1109/SIBCON.2015.7147233\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The bulk acoustic wave resonator with the acoustic Bragg reflector is considered. The materials for the Bragg reflector layers are chosen. These materials are molybdenum for the high-impedance acoustic layers and aluminum for the low-impedance ones. The surface roughness of the molybdenum and aluminum thin-film layers are investigated. The influence of the surface roughness of these layers on the admittance and the quality factor of the acoustic wave resonator with the Bragg reflector is considered.\",\"PeriodicalId\":395729,\"journal\":{\"name\":\"2015 International Siberian Conference on Control and Communications (SIBCON)\",\"volume\":\"25 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-05-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"7\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 International Siberian Conference on Control and Communications (SIBCON)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SIBCON.2015.7147233\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 International Siberian Conference on Control and Communications (SIBCON)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SIBCON.2015.7147233","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The influence of surface roughness of Bragg reflector layers on characteristics of microwave solidly mounted resonator
The bulk acoustic wave resonator with the acoustic Bragg reflector is considered. The materials for the Bragg reflector layers are chosen. These materials are molybdenum for the high-impedance acoustic layers and aluminum for the low-impedance ones. The surface roughness of the molybdenum and aluminum thin-film layers are investigated. The influence of the surface roughness of these layers on the admittance and the quality factor of the acoustic wave resonator with the Bragg reflector is considered.
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