T. Namioka, Masaki Yamamoto, M. Yanagihara, M. Koike
{"title":"软x射线光学用多层材料","authors":"T. Namioka, Masaki Yamamoto, M. Yanagihara, M. Koike","doi":"10.1364/sxray.1991.thb1","DOIUrl":null,"url":null,"abstract":"Soft-x-ray (SXR) multilayers havé been successfully applied to various optical elements and systems, and their technology seems to have been nearly perfected. However, many problems fundamental to multilayers have to be solved for further development. This paper presents results of our studies on some of these problems.","PeriodicalId":409291,"journal":{"name":"Soft-X-Ray Projection Lithography","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1992-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Multilayers for Soft-X-Ray Optics\",\"authors\":\"T. Namioka, Masaki Yamamoto, M. Yanagihara, M. Koike\",\"doi\":\"10.1364/sxray.1991.thb1\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Soft-x-ray (SXR) multilayers havé been successfully applied to various optical elements and systems, and their technology seems to have been nearly perfected. However, many problems fundamental to multilayers have to be solved for further development. This paper presents results of our studies on some of these problems.\",\"PeriodicalId\":409291,\"journal\":{\"name\":\"Soft-X-Ray Projection Lithography\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1992-05-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Soft-X-Ray Projection Lithography\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/sxray.1991.thb1\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Soft-X-Ray Projection Lithography","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/sxray.1991.thb1","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Soft-x-ray (SXR) multilayers havé been successfully applied to various optical elements and systems, and their technology seems to have been nearly perfected. However, many problems fundamental to multilayers have to be solved for further development. This paper presents results of our studies on some of these problems.
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