不同涂层粗糙度下钌纳米薄膜电接触基的长时间稳定性

2015 IEEE 1st International Forum on Research and Technologies for Society and Industry Leveraging a better tomorrow (RTSI) Pub Date : 2015-11-12 DOI:10.1109/RTSI.2015.7325069

S. Karabanov, D. V. Suvorov, G. Gololobov, V. S. Gurov, D. Y. Tarabrin, E. V. Slivkin

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引用次数: 1

摘要

本文介绍了电化学沉积法制备的纳米钌膜接触涂层开关性能的研究结果。在不同的涂层厚度和粗糙度下，接触电阻变化对若干开关循环的依赖关系已经确定。实验结果确定了在稳态模式下提供最小mems开关接触电阻所需的接触涂层的最佳参数。

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Long time stability of electrical contact base on ruthenium nanoscale films at various coating roughness

The paper contains results of researches on switching properties of contact coatings based on nanoscale ruthenium films obtained by the electrochemical deposition method. Dependences of contact resistance changes on a number of switching cycles under various thicknesses and roughness of the coating have been determined. The experiment results have determined optimal parameters of the contact coating necessary for provision of a minimal value of the MEMS-switch contact resistance in the steady mode.

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2015 IEEE 1st International Forum on Research and Technologies for Society and Industry Leveraging a better tomorrow (RTSI)

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