一种新型Cu@Sn@Ag芯壳粒子,用于功率器件封装中的模具附着

Jiahao Liu, Hui Xiao, X. Guo, Xinjie Wang, Zhijun Yao, Xingchao Mao, Hao Liu, Hongtao Chen
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引用次数: 0

摘要

本文制备了一种新颖的Cu@Sn@Ag核壳粒子作为模具附着材料。采用瞬态液相(TLP)的方法,对电源器件进行封装,实现电互连和热传导。两步法化学镀后,Cu颗粒可依次镀上Sn层和Ag层。得到的Cu@Sn@Ag粒子被压缩成预制体。在250°C下回流15分钟后,可完成器件与基板之间的互连。SEM、EDS和XRD分析结果表明,所得结合线由Cu3Sn、Ag3Sn和Cu三个相组成,表明回流后的样品能够承受高温(>475℃,Ag3Sn的熔点)。此外,所得到的结合线显示出优异的力学性能和热性能。经高温(400℃)剪切试验,平均抗剪强度可保持在25.3 MPa。经过500次循环的热冲击后,结合线与衬底之间的界面有效地相互连接,而没有发生破坏。Cu@Sn@Ag核壳粒子作为一种新型的贴片材料,在功率器件封装领域显示出巨大的探索潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A novel Cu@Sn@Ag core-shell particles for die attachment in power device packaging
This paper prepares a novel Cu@Sn@Ag core-shell particles as the die attach material. By the method of Transient Liquid Phase (TLP), the power device can be packaged to realize electrical interconnection and heat conduction. After electroless plating by two-step method, the Cu particles can be coated with Sn layer and Ag layer, successively. The resulting Cu@Sn@Ag particles were compressed into preform. After reflow for 15 min at 250°C, the interconnection can be completed between devices and Substrates. According to the results of SEM, EDS, and XRD, the resulting bondline consists of three phases, namely, Cu3Sn, Ag3Sn and Cu, which indicates that the sample after reflow can withstand high temperature (>475 °C, the melting point of Ag3Sn). Besides, the resulting bondline revealed excellent mechanical properties and thermal properties. After shear testing at high temperature (400°C), the average shear strengths can be maintained at 25.3 MPa. After thermal shocks for 500 cycles, the interface between bondline and substrate was effectively interconnected, rather than occurred the failure. As a novel material for die attachment, the Cu@Sn@Ag core-shell particles reveal great potential of exploration in the field of power device packaging.
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