B. Brzhozovsky, E. Zinina, V. V. Martynov, A. M. Zakharevich
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Impact of low-temperature plasma treatment on electrical properties of CVD coatings of carbide plates
The paper presents the results of studying the influence of morphology and elemental composition, changed by the action of low-temperature plasma, on the electrical properties of CVD coatings of replaceable polyhedral carbide plates.