低温等离子体处理对碳化物板CVD涂层电性能的影响

B. Brzhozovsky, E. Zinina, V. V. Martynov, A. M. Zakharevich
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引用次数: 0

摘要

本文介绍了低温等离子体作用下的形态和元素组成对可替换多面体碳化物板CVD涂层电性能影响的研究结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Impact of low-temperature plasma treatment on electrical properties of CVD coatings of carbide plates
The paper presents the results of studying the influence of morphology and elemental composition, changed by the action of low-temperature plasma, on the electrical properties of CVD coatings of replaceable polyhedral carbide plates.
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