用于电压传感的光机械腔

Qiong Yao, Xia Ji, Fuyin Wang, C. Cao, S. Xiong
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引用次数: 0

摘要

用于测量物理、化学和生物现象的设备必须能够高精度地检测静电电荷。光学腔和机械腔之间的强相互作用是通过纳米光子光机械腔来实现的,它将光场限制在纳米尺度上。由于其强光-机耦合和高光学质量因子腔体,在精密传感领域的应用前景广阔。利用拉链腔和悬浮光子晶体纳米束(PCN)作为可移动的机械谐振器,提出了一种用于电压测量的集成光机械静电计。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Optomechanical Cavity for Electrical Voltage Sensing
Devices for measuring physical, chemical, and biological phenomena must be able to detect electrostatic charge with high accuracy. A strong interaction between an optical cavity and a mechanical resonator is accomplished by a nanophotonic optomechanical cavity, which limits the light field at the nanoscale. It offers promise for applications in precision sensing thanks to its strong optomechanical coupling and high optical quality factor cavity. Using a zipper cavity and a suspended photonic crystal nanobeam (PCN) that functions as a moveable mechanical resonator, an integrated optomechanical electrometer for electrical voltage measurement is presented here.
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