基于大PDMS膜片的光纤法布里-珀罗声传感器

International Symposium on Precision Engineering Measurement and Instrumentation Pub Date : 2019-03-07 DOI:10.1117/12.2511691

Han Zhou, Bingkun Wu, Mingguang Shan, Lei Liu, Haichao Yu, Z. Zhong, Bin Liu

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引用次数: 2

摘要

提出了一种基于聚二甲基硅氧烷(PDMS)膜片的外源法布里-珀罗干涉型光纤传声器。直径为4毫米的大型独立式PDMS膜片是通过简单的“旋带”工艺制备的。实验结果表明，该传感器在100~2000Hz范围内具有较高的动压灵敏度，约为-136 dB re 1 rad/μPa。受环境噪声限制，传声器的噪声等效声信号电平约为1000 μPa/Hz1/2。经测试，动态范围大于47.48 dB。该麦克风有望应用于弱声压测试领域。

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Optical fiber Fabry-Perot acoustic sensor based on large PDMS diaphragm

An extrinsic Fabry-Perot interferometric fibre microphone based on polydimethylsiloxane, or PDMS, diaphragm was proposed. The large free-standing PDMS diaphragm, with a diameter of 4 mm, is prepared by a simple “spin-strip” process. The experimental result shows that the fabricated sensor has a high dynamic pressure sensitivity of about -136 dB re 1 rad/μPa in the range of 100~2000Hz. The noise equivalent acoustic signal level of the microphone, limited by the environmental noise, is about 1000 μPa/Hz1/2. And the dynamic range is tested to be more than 47.48 dB. The proposed microphone is expected to be used in the field of weak acoustic pressure testing.

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International Symposium on Precision Engineering Measurement and Instrumentation

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