寻径完美的EUV掩模:理解使用混合掩模模型的EUV掩模

{"title":"寻径完美的EUV掩模:理解使用混合掩模模型的EUV掩模","authors":"H. Mesilhy, P. Evanschitzky, G. Bottiglieri, E. V. Setten, C. V. Lare, Tim Brunner, M. V. D. Kerkhof, A. Erdmann","doi":"10.1117/12.2601243","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":169926,"journal":{"name":"International Conference on Extreme Ultraviolet Lithography 2021","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Pathfinding the perfect EUV mask: understanding the EUV mask using the hybrid mask model\",\"authors\":\"H. Mesilhy, P. Evanschitzky, G. Bottiglieri, E. V. Setten, C. V. Lare, Tim Brunner, M. V. D. Kerkhof, A. Erdmann\",\"doi\":\"10.1117/12.2601243\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":169926,\"journal\":{\"name\":\"International Conference on Extreme Ultraviolet Lithography 2021\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-09-29\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Conference on Extreme Ultraviolet Lithography 2021\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2601243\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Extreme Ultraviolet Lithography 2021","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2601243","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}