ZnO纳米结构层的传感性能

Lluís M. Guia, P. Rodríguez-Cantó, V. Muñoz-Sanjosé, S. Arana, Càndid Reig
{"title":"ZnO纳米结构层的传感性能","authors":"Lluís M. Guia, P. Rodríguez-Cantó, V. Muñoz-Sanjosé, S. Arana, Càndid Reig","doi":"10.1109/CDE.2017.7905211","DOIUrl":null,"url":null,"abstract":"Nanostructured ZnO layers have been deposited onto SiO2/Si substrates by spray pyrolysis, with previously patterned interdigitated gold electrodes. We have then measured the capacitive and resistive response against ambient parameters such as relative humidity and illumination.","PeriodicalId":421205,"journal":{"name":"2017 Spanish Conference on Electron Devices (CDE)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Sensing properties of ZnO nanostructured layers\",\"authors\":\"Lluís M. Guia, P. Rodríguez-Cantó, V. Muñoz-Sanjosé, S. Arana, Càndid Reig\",\"doi\":\"10.1109/CDE.2017.7905211\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Nanostructured ZnO layers have been deposited onto SiO2/Si substrates by spray pyrolysis, with previously patterned interdigitated gold electrodes. We have then measured the capacitive and resistive response against ambient parameters such as relative humidity and illumination.\",\"PeriodicalId\":421205,\"journal\":{\"name\":\"2017 Spanish Conference on Electron Devices (CDE)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-02-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 Spanish Conference on Electron Devices (CDE)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CDE.2017.7905211\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 Spanish Conference on Electron Devices (CDE)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CDE.2017.7905211","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

采用喷雾热解的方法在SiO2/Si衬底上沉积了纳米结构的ZnO层,并采用预先设计好的互指金电极。然后,我们根据环境参数(如相对湿度和照明)测量了电容和电阻响应。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Sensing properties of ZnO nanostructured layers
Nanostructured ZnO layers have been deposited onto SiO2/Si substrates by spray pyrolysis, with previously patterned interdigitated gold electrodes. We have then measured the capacitive and resistive response against ambient parameters such as relative humidity and illumination.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信