An Air-Gap Type Piezoelectric Composite Thin Film Resonator

A s e l f s u p p o r t e d t h i n film r e s o n a t o r w i t h a v e r y t h i n a i r g a p b e t w e e n t h e s e m i c o n d u c t o r s u r f a c e and the diaphragm bottom surface has been newly developed. The f e a t u r e s , f a b r i c a t i o n p r o c e s s , e x p e r i m e n t a l r e s u l t s , t h e o r e t i c a l s t u d i e s u s i n g a d i s t r i b u t e d c o n s t a n t e q u i v a l e n t c i r c u i t f o r r e a l i z a t i o n o f noninharmon ic over tone response and a VC0 a p p l i c a t i o n a r e d e s c r i b e d i n t h i s p a p e r .