用于单片毫米波集成电路的高速光学探测器

Proceedings of IEEE/Cornell Conference on Advanced Concepts in High Speed Semiconductor Devices and Circuits Pub Date : 1993-08-02 DOI:10.1109/CORNEL.1993.303078

K. Litvin, J. Burm, D. Woodard, W. Schaff, L. F. Eastman

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引用次数: 4

摘要

具有互指肖特基势垒指的金属-半导体-金属光电二极管正被开发用于单片光接收电路，目的是检测通过光载波传输的毫米波调制信号。该器件是平面的，并结合了亚微米指间距和薄吸收区，以提高速度，并埋置了一堆调谐布拉格反射器，以提高载波波长的灵敏度。这些器件与短门MODFET放大器集成，形成完整的单片集成光接收电路。

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High speed optical detectors for monolithic millimeter wave integrated circuits

Metal-semiconductor-metal photodiodes with interdigitated Schottky barrier fingers are being developed for applications in monolithic optical receiver circuits with the purpose of detecting millimeter wave modulation signals being transmitted via an optical carrier. The devices are planar and incorporate submicron finger spacings and a thin absorption region for speed with a buried stack of tuned Bragg reflectors for enhanced sensitivity at the carrier wavelength. These devices are being integrated with short-gate MODFET amplifiers to form the complete monolithic integrated optical receiver circuit.<>

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Proceedings of IEEE/Cornell Conference on Advanced Concepts in High Speed Semiconductor Devices and Circuits

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