{"title":"商用共聚焦显微镜中用于柔性z轴控制的MEMS反射镜","authors":"S. Lukes, D. Dickensheets","doi":"10.1109/OMEMS.2012.6318846","DOIUrl":null,"url":null,"abstract":"We describe the use of a deformable membrane mirror for fast and flexible focus control in a commercial confocal microscope. En-face and oblique imaging over a 55 μm focal range has been demonstrated.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"38 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"MEMS mirror for flexible z-axis control in a commercial confocal microscope\",\"authors\":\"S. Lukes, D. Dickensheets\",\"doi\":\"10.1109/OMEMS.2012.6318846\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We describe the use of a deformable membrane mirror for fast and flexible focus control in a commercial confocal microscope. En-face and oblique imaging over a 55 μm focal range has been demonstrated.\",\"PeriodicalId\":347863,\"journal\":{\"name\":\"2012 International Conference on Optical MEMS and Nanophotonics\",\"volume\":\"38 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-10-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 International Conference on Optical MEMS and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2012.6318846\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2012.6318846","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
MEMS mirror for flexible z-axis control in a commercial confocal microscope
We describe the use of a deformable membrane mirror for fast and flexible focus control in a commercial confocal microscope. En-face and oblique imaging over a 55 μm focal range has been demonstrated.
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