吹多晶硅熔断器:什么条件是最好的?

2006 IEEE International Integrated Reliability Workshop Final Report Pub Date : 2006-10-01 DOI:10.1109/IRWS.2006.305244

Yuanjing Li, A. Tang

{"title":"吹多晶硅熔断器:什么条件是最好的?","authors":"Yuanjing Li, A. Tang","doi":"10.1109/IRWS.2006.305244","DOIUrl":null,"url":null,"abstract":"A study has been conducted to understand polysilicon fuse blow mechanisms and determine optimized blow conditions. The correlation of optical microscope images, cross section SEM (scanning electron microscope) images, and electrical waveforms of fuses blown at different voltages revealed two different blow mechanisms. Furthermore, SEM images of fuses blown using different pulse widths showed the physical changes of fuses during the fuse blow process","PeriodicalId":199223,"journal":{"name":"2006 IEEE International Integrated Reliability Workshop Final Report","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"Blowing Polysilicon Fuses: What Conditions are Best?\",\"authors\":\"Yuanjing Li, A. Tang\",\"doi\":\"10.1109/IRWS.2006.305244\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A study has been conducted to understand polysilicon fuse blow mechanisms and determine optimized blow conditions. The correlation of optical microscope images, cross section SEM (scanning electron microscope) images, and electrical waveforms of fuses blown at different voltages revealed two different blow mechanisms. Furthermore, SEM images of fuses blown using different pulse widths showed the physical changes of fuses during the fuse blow process\",\"PeriodicalId\":199223,\"journal\":{\"name\":\"2006 IEEE International Integrated Reliability Workshop Final Report\",\"volume\":\"4 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 IEEE International Integrated Reliability Workshop Final Report\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IRWS.2006.305244\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 IEEE International Integrated Reliability Workshop Final Report","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRWS.2006.305244","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 6

摘要

研究了多晶硅熔断器的熔断机理，确定了最佳熔断条件。通过对不同电压下熔断保险丝的光学显微镜图像、扫描电镜(SEM)截面图像和电波形的对比分析，揭示了两种不同的熔断机制。此外，采用不同脉冲宽度熔断保险丝的SEM图像显示了熔断过程中保险丝的物理变化

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Blowing Polysilicon Fuses: What Conditions are Best?

A study has been conducted to understand polysilicon fuse blow mechanisms and determine optimized blow conditions. The correlation of optical microscope images, cross section SEM (scanning electron microscope) images, and electrical waveforms of fuses blown at different voltages revealed two different blow mechanisms. Furthermore, SEM images of fuses blown using different pulse widths showed the physical changes of fuses during the fuse blow process

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2006 IEEE International Integrated Reliability Workshop Final Report

自引率

0.00%

发文量