利用奇偶函数改进了三平面法

C. Ai, J. Wyant
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引用次数: 0

摘要

在菲索干涉仪中,两个平面相对形成一个空腔。检测到的干涉条纹显示了腔的平整度。在传统的三平面方法中,1、2平面是成对比较的。通过旋转平面相对于对方,精确轮廓沿几个直径的每个平面得到。提出了一种多平面多组合的方法然而,这两种方法都只能求解沿某些直线的轮廓。已经提出了几种方法来测量整个表面的平整度。这些方法涉及大量的最小二乘计算。因此,表面的精细结构趋于消失。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Modified three-flat method using even and odd functions
In a Fizeau interferometer, two flats face each other and form a cavity. The interference fringes detected reveal the flatness of the cavity. In the traditional three-flat method,1,2 the flats are compared in pairs. By rotating the flats with respect to each other, the exact profiles along several diameters of each flat are obtained. A method with more flats and more combinations has been proposed.3 However, with both methods, only the profiles along some straight lines can be solved. Several methods4-8 have been proposed to measure the flatness of the entire surface. These methods involve tremendous least squares calculations. Thus, the fine structure of the surface tends to disappear.
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