用于直接探测低能x射线的CMOS图像传感器的设计和特性

B. Marsh, D. Das, I. Sedgwick, R. Turchetta, M. Bayer, J. Correa, P. Gottlicher, S. Lange, A. Marras, I. Shevyakov, S. Smoljanin, M. Viti, C. Wunderer, Q. Xia, M. Zimmer, G. Cautero, D. Giuressi, R. Menk, L. Stebel, H. Yousef, J. Marchal, U. Pedersen, N. Rees, N. Tartoni, H. Graafsma
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引用次数: 5

摘要

自由电子激光器和同步加速器的光辉正在迅速增加。这导致了对大动态范围和高帧率传感器的需求,现在由卢瑟福阿普尔顿实验室开发的用于直接x射线检测的PERCVIAL CMOS成像仪实现。PERCIVAL利用横向溢出像素和背面照明,同时实现低噪声单光子检测和高达107 e-的高全井,同时保持120Hz的帧率。PERCIVAL目前处于测试结构阶段,将于2015年生产200万像素和1300万像素的“晶圆级”型号。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
PERCIVAL: The design and characterisation of a CMOS image sensor for direct detection of low-energy X-rays
Free-Electron Lasers and Synchrotrons are rapidly increasing in brilliance. This has led a requirement of large dynamic range and high frame rate sensors that is now being fulfilled by the PERCVIAL CMOS imager for direct X-ray detection developed at Rutherford Appleton Laboratory. Utilising a lateral overflow pixel and back-side illumination, PERCIVAL simultaneously achieves low-noise single-photon detection and high full well up to 107 e-, all while maintaining a frame rate of 120Hz. PERCIVAL is currently in test structure stage, and will be produced in 2 Mpixel and 13 Mpixel “waferscale” variants in 2015.
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