空间选择性畴反转微分蚀刻铌酸锂波导的制备与优化

I. E. Barry, G. W. Ross, P. Smith, R. Eason
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引用次数: 0

摘要

铌酸锂由于其良好的电光、声光、压电、弹性和光折变特性而被广泛应用。设计精确控制和非常光滑的结构的能力可以应用于横向制导,如波导和调制器,光子带隙结构中的多阵列以及表面声波器件,如滤波器和时间延迟。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fabrication and Optimisation of Waveguides in Lithium Niobate by Differential Etching Following Spatially Selective Domain Inversion
Lithium niobate is extensively used in a wide range of applications, due to its favourable electrooptic, acousto-optic, piezoelectric, elastic and photorefractive properties. The ability to engineer precisely controlled and very smooth structures has applications in lateral guidance such as waveguides and modulators, for multiple arrays in photonic bandgap structures and for surface acoustic wave devices such as filters and time delays.
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