{"title":"MEMS倾斜微镜的开关容量","authors":"D. Marom","doi":"10.1109/OMEMS.2012.6318864","DOIUrl":null,"url":null,"abstract":"The theoretical switching capacity of MEMS tilting micromirrors is calculated, based solely on their size and angular tilt range. The metrics developed can be used to compare different mirror designs and their performance potential.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"13 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Switching capacity of MEMS tilting micromirrors\",\"authors\":\"D. Marom\",\"doi\":\"10.1109/OMEMS.2012.6318864\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The theoretical switching capacity of MEMS tilting micromirrors is calculated, based solely on their size and angular tilt range. The metrics developed can be used to compare different mirror designs and their performance potential.\",\"PeriodicalId\":347863,\"journal\":{\"name\":\"2012 International Conference on Optical MEMS and Nanophotonics\",\"volume\":\"13 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-10-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 International Conference on Optical MEMS and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2012.6318864\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2012.6318864","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The theoretical switching capacity of MEMS tilting micromirrors is calculated, based solely on their size and angular tilt range. The metrics developed can be used to compare different mirror designs and their performance potential.
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