不同厚度TiO2薄膜作为EGFET pH传感器传感膜的传感性能

2015 International Symposium on Technology Management and Emerging Technologies (ISTMET) Pub Date : 2015-08-01 DOI:10.1109/ISTMET.2015.7358995

M. A. Zulkefle, Rohanieza Abdul Rahman, M. Rusop Mahmood, W. Abdullah, S. H. Herman

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引用次数: 5

摘要

本研究采用二氧化钛(TiO2)作为传感膜，改变传感膜的厚度，研究传感膜厚度对EGFET pH传感器灵敏度的影响。采用溶胶-凝胶自旋镀膜技术在氧化铟锡(ITO)衬底上制备了薄膜形式的TiO2传感膜。结果表明，厚度的增加会使薄膜表面粗糙度增大。所有样品均呈近似1的线性关系，表明TiO2适合且稳定地用于检测不同pH值溶液中的氢离子。测量了样品的灵敏度，结果表明，最薄的样品灵敏度最高，为56 mV/pH。这个值接近于59 mV/pH的能氏理论值。

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Sensing capability of TiO2 thin films with different thicknesses as sensing membrane of EGFET pH sensor

For this research, titanium dioxide (TiO2) is used as the sensing membrane and the thickness of the sensing membrane is varied to study the influence of thickness of sensing membrane towards EGFET pH sensor sensitivity. TiO2 sensing membrane in form of thin film was deposited on an indium tin oxide (ITO) substrate where sol-gel spin coating technique was chosen as the depositing technique. Result shows that increasing thickness will increase the thin film surface roughness. All samples have linearity approximately 1 which indicates that TiO2 is suitable and stable to be used to detect hydrogen ion in solution with different pH values. The sample sensitivity was measured and the result shows that the thinnest sample has the highest sensitivity with value of 56 mV/pH. This value is close to Nernstian theoretical value of 59 mV/pH.

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2015 International Symposium on Technology Management and Emerging Technologies (ISTMET)

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