高速,超紧凑光谱仪采用高对比度光栅扫描波长检测器

Weijian Yang, Li Zhu, Y. Rao, C. Chase, Michael Huang, C. Chang-Hasnain
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引用次数: 3

摘要

芯片级光谱仪在医学诊断、生化传感、环境监测等各种芯片实验室系统中的应用越来越广泛,引起了越来越多的研究兴趣。在光网络中作为紧凑的波长计也是理想的。芯片级光谱仪已经取得了重大进展,并展示了各种配置,如超棱镜或阵列波导光栅[1,2],法布里-珀罗滤波器阵列[3],微谐振器阵列[4]等。然而,在这些色散元件或谐振阵列的分辨率和占用空间之间存在一个基本的权衡。另一方面,可调谐法布里-珀罗滤波器将频谱从空域分裂到时域。它只需要一个光电探测器,同时可以实现高分辨率和小占地面积[5]。为了进一步减少整个系统的占地面积,我们将可调谐法布里-珀罗滤波器与光电探测器单片集成到一个设备中,这里称为扫描波长探测器。它采用Fabry-Perot腔中的量子阱结构,采用高对比度光栅(HCG)[6]作为微机可动顶反射器,采用分布式布拉格反射器(DBR)作为底反射器,如图1所示。超高反射率和重量轻的HCG确保了高的技巧和高的调谐速度。实验证明,在1550 nm处的总带宽为33.5 nm,工作速度为200 kHz。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
High speed, ultra-compact spectrometer using high contrast grating swept-wavelength detector
Chip-scale optical spectrometers have been drawing more and more research interests for its increasing applications in various lab-on-a-chip systems, e.g. medical diagnostics, biochemical sensing, and environmental monitoring, etc. It is also desirable in optical networks as a compact wavemeter. Significant progress has been made and chip-scale spectrometers have been demonstrated with various configurations, such as superprism or arrayed waveguide grating [1,2], Fabry-Perot filter array [3], micro-resonator array [4], etc. However, there is a fundamental tradeoff between the resolution and footprint on these dispersive components or resonance array. Tunable Fabry-Perot filter, on the other hand, turns the spectrum splitting from the spatial domain into temporal domain. It requires only one photodetector, and can achieve high resolution and small footprint at the same time [5]. To further reduce the footprint of the whole system, here we monolithically integrate the tunable Fabry-Perot filter with the photodetector into one single device, herein referred as a swept-wavelength detector. It employs quantum well structures in a Fabry-Perot cavity, with a high contrast grating (HCG) [6] as a microelectromechanical actuable top reflector and a distributed Bragg reflector (DBR) as the bottom reflector, shown in Figure 1. The ultrahigh reflectivity and light-weight of the HCG ensures a high finesse and a high tuning speed. A total bandwidth of 33.5 nm at 1550 nm and an operation speed of 200 kHz are experimentally demonstrated.
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