气膜粘度对微静电扭转镜阻尼的影响

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI:10.1109/MEMSYS.2000.838559

N. Uchida, K. Uchimaru, M. Yonezawa, M. Sekimura

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引用次数: 6

摘要

介绍了一种分析电极上有深沟槽的静电驱动扭力镜执行器阻尼特性的方法。阻尼力是由运动镜板和电极之间的气体膜的粘性摩擦引起的。所述凹槽减小了阻尼力，使所述移动板能够以高速和低驱动电压驱动。为了正确计算阻尼力，不仅要考虑运动板和电极上的粘性摩擦，还要考虑凹槽侧壁上的粘性摩擦。为此，引入了水力平均深度的概念，并将其应用于雷诺方程。计算得到的阻尼力与所研制的光学头扭镜驱动器的阻尼力实测值吻合较好。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Damping of micro electrostatic torsion mirror caused by air-film viscosity

A method of analyzing the damping characteristics of electrostatically driven torsion mirror actuators which have deep grooves on their electrodes is described. The damping force is caused by viscous friction of the gas film between a moving mirror plate and the electrodes. The grooves decrease the damping force and enable the moving plate to be driven at high speed and low driving voltage. To calculate the damping force correctly, it is necessary to consider the viscous friction not only on the moving plate and electrodes, but also on the sidewalls of the grooves. For that purpose, the idea of hydraulic mean depth is introduced and is applied to the Reynolds equation. The calculated damping force shows good agreement with the measured damping force of the developed torsion mirror actuator for optical heads.

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来源期刊

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)

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