基于金属-绝缘体-金属结构的冷阴极

Proceedings of the IEEE - Russia Conference. 1999 High Power Microwave Electronics: Measurements, Identification, Applications. MIA-ME'99 (Cat. No.99EX289) Pub Date : 1999-09-21 DOI:10.1109/MIAME.1999.827842

P.E. Trotan, S. S. Kramor

{"title":"基于金属-绝缘体-金属结构的冷阴极","authors":"P.E. Trotan, S. S. Kramor","doi":"10.1109/MIAME.1999.827842","DOIUrl":null,"url":null,"abstract":"Hybrid vacuum integrated circuits operating in the UHF range is one application where cold cathodes with high current density are needed. The cold cathode based on the formed metal-insulator-metal (MIM) structure is a kind of field emitter and it can be potentially used for some UHF applications. Formed MIM cathodes have demonstrated current densities up to 0.5 A/cm/sup 2/, but these values are low and have to be improved. Forming is the final step of MIM cathode fabrication strongly affecting its emission characteristics. Despite the fact that numerous work has been done in this field, many aspects of the forming process still remain unclear. The present paper reports some new results on studying the forming process in MIM systems.","PeriodicalId":132112,"journal":{"name":"Proceedings of the IEEE - Russia Conference. 1999 High Power Microwave Electronics: Measurements, Identification, Applications. MIA-ME'99 (Cat. No.99EX289)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-09-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Cold cathode based on a formed metal-insulator-metal structure\",\"authors\":\"P.E. Trotan, S. S. Kramor\",\"doi\":\"10.1109/MIAME.1999.827842\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Hybrid vacuum integrated circuits operating in the UHF range is one application where cold cathodes with high current density are needed. The cold cathode based on the formed metal-insulator-metal (MIM) structure is a kind of field emitter and it can be potentially used for some UHF applications. Formed MIM cathodes have demonstrated current densities up to 0.5 A/cm/sup 2/, but these values are low and have to be improved. Forming is the final step of MIM cathode fabrication strongly affecting its emission characteristics. Despite the fact that numerous work has been done in this field, many aspects of the forming process still remain unclear. The present paper reports some new results on studying the forming process in MIM systems.\",\"PeriodicalId\":132112,\"journal\":{\"name\":\"Proceedings of the IEEE - Russia Conference. 1999 High Power Microwave Electronics: Measurements, Identification, Applications. MIA-ME'99 (Cat. No.99EX289)\",\"volume\":\"29 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-09-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the IEEE - Russia Conference. 1999 High Power Microwave Electronics: Measurements, Identification, Applications. MIA-ME'99 (Cat. No.99EX289)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MIAME.1999.827842\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the IEEE - Russia Conference. 1999 High Power Microwave Electronics: Measurements, Identification, Applications. MIA-ME'99 (Cat. No.99EX289)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MIAME.1999.827842","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

在UHF范围内工作的混合真空集成电路是需要具有高电流密度的冷阴极的一种应用。基于成形金属-绝缘子-金属(MIM)结构的冷阴极是一种场发射体，在超高频应用中具有潜在的应用前景。形成的MIM阴极已经证明电流密度高达0.5 A/cm/sup 2/，但这些值很低，必须改进。成形是MIM阴极制造的最后一步，对其发射特性有很大影响。尽管在这一领域已经做了大量的工作，但成形过程的许多方面仍然不清楚。本文报道了在MIM系统成形过程研究方面的一些新成果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Cold cathode based on a formed metal-insulator-metal structure

Hybrid vacuum integrated circuits operating in the UHF range is one application where cold cathodes with high current density are needed. The cold cathode based on the formed metal-insulator-metal (MIM) structure is a kind of field emitter and it can be potentially used for some UHF applications. Formed MIM cathodes have demonstrated current densities up to 0.5 A/cm/sup 2/, but these values are low and have to be improved. Forming is the final step of MIM cathode fabrication strongly affecting its emission characteristics. Despite the fact that numerous work has been done in this field, many aspects of the forming process still remain unclear. The present paper reports some new results on studying the forming process in MIM systems.

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Proceedings of the IEEE - Russia Conference. 1999 High Power Microwave Electronics: Measurements, Identification, Applications. MIA-ME'99 (Cat. No.99EX289)

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