有机集成光学器件中超薄金中间层有机薄膜的室温键合

2019 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2019-07-01 DOI:10.1109/OMN.2019.8925169

Michitaka Yamamoto, T. Matsumae, Y. Kurashima, H. Takagi, T. Suga, T. Itoh, E. Higurashi

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引用次数: 0

摘要

采用超薄金中间层的表面活化键合(SAB)技术，在室温环境空气中实现了有机薄膜的键合。此外，利用超薄金中间层对有机薄膜和硅衬底进行真空密封。空腔上的膜在粘接后18天仍有偏转，这意味着超薄(15 nm)的Au膜具有粘附层，实现了真空密封。

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Room-temperature bonding of organic films using ultrathin Au intermediate layers for organic integrated optical devices

Room-temperature bonding of organic films in ambient air was demonstrated by SAB (surface activated bonding) using ultrathin Au intermediate layers. Furthermore, vacuum sealing of organic film and Si substrate with cavities were performed by SAB using ultrathin Au intermediate layers. The membrane on the cavity had the deflection even18 days after bonding, meaning that vacuum sealing was achieved by ultrathin (15 nm) Au film with adhesion layers.

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2019 International Conference on Optical MEMS and Nanophotonics (OMN)

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