下一代半导体生产设备的成本和产量

International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM Pub Date : 1994-06-21 DOI:10.1109/ISSM.1994.729445

T. Iwata

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引用次数: 0

摘要

当我们考虑下一代半导体生产设备的成本和吞吐量时，首先我们应该明确整个下一代半导体生产线系统的规格，即制造能力和投资金额。然后对该值进行了分析，得出了该生产线系统所使用的生产设备的成本和吞吐量。在此步骤中，删除了设备不需要的功能和过高的性能。根据这些程序可以明确适当的生产设备开发目标。

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Cost And Throughput Of The Next Generation Semiconductor Production Equipments

When we think about the cost and the throughput of the next generation semiconductor production quipment, first of all we should clarify the specification of the entire next generation semiconductor manufacturing line system, that is, manufacturing ability and amount of the investment. Next, we analyze this value and we obtain the cost and the throughput of the production equipments used in this line system. In this step, a needless function and excessive performance for the equipments are deleted. A proper target of the production equipment development can be clarified according to such procedures.

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International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM

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