光电应用磷化铟的微观力学

1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings Pub Date : 1997-10-07 DOI:10.1109/SMICND.1997.651240

K. Hjort

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引用次数: 3

摘要

基于磷化铟的微光电机械(MOEMs)有望在更长的波长区域，特别是在电信网络中的应用。本文介绍了磷化铟微力学研究的最新进展:磷化铟的力学特性、微加工和制备方法以及磷化铟的未来器件和应用。

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Micromechanics in indium phosphide for opto electrical applications

Indium phosphide based micro opto electro mechanics (MOEMs) hold promises of micromechanical applications in the longer wavelength region, and in particular for applications in telecommunication networks. Recent work on indium phosphide micromechanics is presented: the mechanics, the micromachining and fabrication, and possible future devices and applications.

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来源期刊

1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings

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