基于cmos的传感器和执行器

Proceedings Eleventh Annual IEEE International ASIC Conference (Cat. No.98TH8372) Pub Date : 1998-09-13 DOI:10.1109/ASIC.1998.723047

F. Van Steenkiste, D. Maes, L. Haspeslagh, S. Sedky, P. Van Gerwen, S. Vandergroen, K. Baert

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引用次数: 1

摘要

在许多应用中，多达数百万个传感器或执行器必须连接到外部世界，这使得电路的单片集成成为必要。大规模生产的换能器也追求单片集成。如今，单片器件包括可见光和红外成像仪、显示器、喷墨头、生化和物理传感器。传感器特定工艺(如微加工)与标准CMOS工艺的单片集成是可能的，尽管工艺复杂性增加。

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CMOS-based sensors and actuators

In many applications, up to millions of sensors or actuators have to be connected to the outside world, making the monolithic integration of circuits mandatory. Monolithic integration is also pursued for mass-produced transducers. Today, monolithic devices include visible and IR imagers, displays, inkjet heads, biochemical and physical sensors. Monolithic integration of transducer-specific processes (such as micromachining) with standard CMOS processes is possible, albeit at an increase of process complexity.

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来源期刊

Proceedings Eleventh Annual IEEE International ASIC Conference (Cat. No.98TH8372)

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