无先验移位知识的相移干涉测量中干涉图样的解码算法

V. Guzhov, S. Ilinykh, D. Haydukov, R. A. Kuznetzov
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引用次数: 3

摘要

基于分步偏移的干涉图解码方法广泛应用于干涉测量系统的创建。移相法是将参考波的相位改变为已知值时,获得若干干涉图的方法。现有解码算法的精度取决于插入相移值的设置。然而,在实际中,由于进行相移的器件存在误差,很难确定相移的精确值。本文研究了一种不需要先验相移知识的阶跃相移算法。该算法使用任意相移的三幅干涉图。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Decoding algorithm for interference patterns in phase shifting interferometry without a priori shift knowledge
Interferogram's decoding methods based on the step-by-step shift are widely used in creation of interference measuring systems. The phase-shifting method is based on obtaining several interferograms when the phase of reference wave is changed to known values. Accuracy of existing decoding algorithms depends on a setting of values of inserted phase shifts. However, it is difficult to determine an exact value of the phase shift in practice because of errors of devices performing a phase shift. In this paper an algorithm based on the step phase-shifting without a priori knowledge of phase shift is considered. This algorithm uses three interferograms obtained with arbitrary phase shifts.
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