{"title":"混合超薄硅和电光聚合物波导调制器","authors":"Yukinori Inoue, H. Miura, S. Yokoyama","doi":"10.23919/MOC.2017.8244606","DOIUrl":null,"url":null,"abstract":"Compact and, low driving voltage optical modulator is the key device for high-speed on-chip optical interconnects. We have fabricated a hybrid silicon and electro-optic (EO) polymer modulator and demonstrated its EO properties. We used thin silicon core and planar electrodes to enable the modulator a low driving voltage.","PeriodicalId":123743,"journal":{"name":"2017 22nd Microoptics Conference (MOC)","volume":"66 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-11-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Hybrid ultra thin silicon and electro-optic polymer waveguide modulator\",\"authors\":\"Yukinori Inoue, H. Miura, S. Yokoyama\",\"doi\":\"10.23919/MOC.2017.8244606\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Compact and, low driving voltage optical modulator is the key device for high-speed on-chip optical interconnects. We have fabricated a hybrid silicon and electro-optic (EO) polymer modulator and demonstrated its EO properties. We used thin silicon core and planar electrodes to enable the modulator a low driving voltage.\",\"PeriodicalId\":123743,\"journal\":{\"name\":\"2017 22nd Microoptics Conference (MOC)\",\"volume\":\"66 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-11-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 22nd Microoptics Conference (MOC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.23919/MOC.2017.8244606\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 22nd Microoptics Conference (MOC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/MOC.2017.8244606","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Hybrid ultra thin silicon and electro-optic polymer waveguide modulator
Compact and, low driving voltage optical modulator is the key device for high-speed on-chip optical interconnects. We have fabricated a hybrid silicon and electro-optic (EO) polymer modulator and demonstrated its EO properties. We used thin silicon core and planar electrodes to enable the modulator a low driving voltage.
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