A. Hunter, C. Tanasa, R. Ramanujam, A. Tang, N. Tam, B. Ramachandran, R. Achutharaman, S. Ramamurthy, J. Ranish
{"title":"超低温NISI加工","authors":"A. Hunter, C. Tanasa, R. Ramanujam, A. Tang, N. Tam, B. Ramachandran, R. Achutharaman, S. Ramamurthy, J. Ranish","doi":"10.1109/RTP.2005.1613705","DOIUrl":null,"url":null,"abstract":"Manuscript not released forpublication due to legal issues.","PeriodicalId":253409,"journal":{"name":"2005 13th International Conference on Advanced Thermal Processing of Semiconductors","volume":"120 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Ultra low temperature NISI processing\",\"authors\":\"A. Hunter, C. Tanasa, R. Ramanujam, A. Tang, N. Tam, B. Ramachandran, R. Achutharaman, S. Ramamurthy, J. Ranish\",\"doi\":\"10.1109/RTP.2005.1613705\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Manuscript not released forpublication due to legal issues.\",\"PeriodicalId\":253409,\"journal\":{\"name\":\"2005 13th International Conference on Advanced Thermal Processing of Semiconductors\",\"volume\":\"120 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-10-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2005 13th International Conference on Advanced Thermal Processing of Semiconductors\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/RTP.2005.1613705\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2005 13th International Conference on Advanced Thermal Processing of Semiconductors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/RTP.2005.1613705","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
