Hooi Leng Ng-Lee, S. C. Goh, C. Ranjit, .. Maryanto, Jie Ying Sarah Ng, A. Asundi
{"title":"微透镜测试:一个应用","authors":"Hooi Leng Ng-Lee, S. C. Goh, C. Ranjit, .. Maryanto, Jie Ying Sarah Ng, A. Asundi","doi":"10.1117/12.814595","DOIUrl":null,"url":null,"abstract":"A measurement system for measuring effective focal length of a microlens is presented. The system consists of a microprocessor controlled 3-axis stage with an optical system which provides 500 times magnification for focal length and diameter measurement. The focal length testing is carried out by single pass (transmission) approach. A point source from halogen white light is used as the object for the measurement. A CCD camera displays the magnified image on a computer. Focusing is performed by moving the microlens along the principal axis by manual control of a stepper motor and observation of the image on the computer. Similarly, moving the microlens along its substrate plane and capturing three points on its circumference gives its diameter. The co-ordinates of the 3-axis stage and diameter are displayed separately on dot-matrix LCD panel. Anti-backlash mechanisms are employed on all axes, each with a positioning resolution of 1 μm.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"48 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Microlens testing: an application\",\"authors\":\"Hooi Leng Ng-Lee, S. C. Goh, C. Ranjit, .. Maryanto, Jie Ying Sarah Ng, A. Asundi\",\"doi\":\"10.1117/12.814595\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A measurement system for measuring effective focal length of a microlens is presented. The system consists of a microprocessor controlled 3-axis stage with an optical system which provides 500 times magnification for focal length and diameter measurement. The focal length testing is carried out by single pass (transmission) approach. A point source from halogen white light is used as the object for the measurement. A CCD camera displays the magnified image on a computer. Focusing is performed by moving the microlens along the principal axis by manual control of a stepper motor and observation of the image on the computer. Similarly, moving the microlens along its substrate plane and capturing three points on its circumference gives its diameter. The co-ordinates of the 3-axis stage and diameter are displayed separately on dot-matrix LCD panel. Anti-backlash mechanisms are employed on all axes, each with a positioning resolution of 1 μm.\",\"PeriodicalId\":191475,\"journal\":{\"name\":\"International Symposium on Laser Metrology\",\"volume\":\"48 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-10-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Symposium on Laser Metrology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.814595\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Symposium on Laser Metrology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.814595","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A measurement system for measuring effective focal length of a microlens is presented. The system consists of a microprocessor controlled 3-axis stage with an optical system which provides 500 times magnification for focal length and diameter measurement. The focal length testing is carried out by single pass (transmission) approach. A point source from halogen white light is used as the object for the measurement. A CCD camera displays the magnified image on a computer. Focusing is performed by moving the microlens along the principal axis by manual control of a stepper motor and observation of the image on the computer. Similarly, moving the microlens along its substrate plane and capturing three points on its circumference gives its diameter. The co-ordinates of the 3-axis stage and diameter are displayed separately on dot-matrix LCD panel. Anti-backlash mechanisms are employed on all axes, each with a positioning resolution of 1 μm.