L. Golonka, A. Dziedzic, J. Dziuban, J. Kita, T. Zawada
{"title":"用于MEMS器件的LTCC封装","authors":"L. Golonka, A. Dziedzic, J. Dziuban, J. Kita, T. Zawada","doi":"10.1117/12.517066","DOIUrl":null,"url":null,"abstract":"LTCC package of silicon membrane katharometer was made and investigated. The package protects the katharometer against mechanical damage and makes possible an easy connection of electrical signals. Moreover, the heater and temperature sensors allow for obtaining the proper temperature of the element. The basic electrical parameters of the integrated heater and thermistors as well as measured temperature distribution are presented.","PeriodicalId":405495,"journal":{"name":"Optoelectronic and Electronic Sensors","volume":"21 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-09-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"11","resultStr":"{\"title\":\"LTCC package for MEMS device\",\"authors\":\"L. Golonka, A. Dziedzic, J. Dziuban, J. Kita, T. Zawada\",\"doi\":\"10.1117/12.517066\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"LTCC package of silicon membrane katharometer was made and investigated. The package protects the katharometer against mechanical damage and makes possible an easy connection of electrical signals. Moreover, the heater and temperature sensors allow for obtaining the proper temperature of the element. The basic electrical parameters of the integrated heater and thermistors as well as measured temperature distribution are presented.\",\"PeriodicalId\":405495,\"journal\":{\"name\":\"Optoelectronic and Electronic Sensors\",\"volume\":\"21 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-09-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"11\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optoelectronic and Electronic Sensors\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.517066\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optoelectronic and Electronic Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.517066","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
LTCC package of silicon membrane katharometer was made and investigated. The package protects the katharometer against mechanical damage and makes possible an easy connection of electrical signals. Moreover, the heater and temperature sensors allow for obtaining the proper temperature of the element. The basic electrical parameters of the integrated heater and thermistors as well as measured temperature distribution are presented.
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