沸石薄膜的光学偏振特性:医学应用方面

2016 IEEE International Symposium on Medical Measurements and Applications (MeMeA) Pub Date : 2016-05-15 DOI:10.1109/MeMeA.2016.7533757

A. Fiorillo, S. P. Rudenko, M. Stetsenko, L. S. Maksimenko

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引用次数: 3

摘要

采用与集成电路技术完全兼容的低温自旋镀膜方法制备了沸石多孔膜。利用调制偏振光谱技术研究了沉积膜的光偏振特性。在硅片上获得了低介电性能和内部孔隙结构。讨论了这些研究在生物传感器应用中的各个方面，尽管在开始时沸石薄膜经历了研究。

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Optical polarization properties of zeolite thin films: Aspects for medical applications

Zeolite porous films have been produced by spin coating deposition at low temperature according to a procedure fully compatible with integrated circuit technology. Optical polarization properties of the deposited film have been studied by the modulation-polarization spectroscopy technique. Low-dielectric properties and internal porosity structure of the zeolite on Si wafer can be obtained. The aspects of these studies for biosensor applications are discussed, although in the beginning the zeolite thin films undergoes to studying.

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2016 IEEE International Symposium on Medical Measurements and Applications (MeMeA)

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