嵌入苯并环丁烯的宽间隙无热硅槽马赫-珍德干涉仪

8th IEEE International Conference on Group IV Photonics Pub Date : 2011-11-01 DOI:10.1109/GROUP4.2011.6053821

Y. Atsumi, M. Oda, Joonhyun Kang, N. Nishiyama, S. Arai

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引用次数: 0

摘要

介绍了一种具有宽间隙硅槽波导的非热马赫-珍德干涉仪。该结构在制造成品率和可重复性方面优越，并且实现了波长小至- 0.9 pm/K的温度依赖性。

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Wide-gap athermal Si-slot Mach-Zhender Interferometer embedded with Benzocyclobutene

An athermal Mach-Zhender Interferometer with wide-gap Si-slot waveguides was demonstrated. This structure is superior in terms of fabrication yield and reproducibility, and the temperature dependence of the wavelengths as small as −0.9 pm/K was achieved.

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8th IEEE International Conference on Group IV Photonics

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