{"title":"y形切割LiNbO3的SAW速度测量新方法","authors":"M. Anhorn, H. Engan, A. Rønnekleiv","doi":"10.1109/ULTSYM.1987.198969","DOIUrl":null,"url":null,"abstract":"Recent measiirements on SAW velocities are reported. The results are based on scanning of a laser probe across the propagation beam at certain intervals. Previously reported measurements on YZ LiNb03 have been extended to include the complete Y surface. For t.his orientation, results for both a free surface and a metallized surface are reported. A noticeable digference has been found between the beam steering properties of free and met.alized surface around Z propagation direction. Effects from va r i a t ion (I) f me t a 1 1 i z a t i on t h i c kne s s have been studied also and are presented. Many SAW devices use parallel metal strips on the substrate surface. Measurements on the angular variation of SAW velocities in such st.ructiires are reported.","PeriodicalId":309261,"journal":{"name":"IEEE 1987 Ultrasonics Symposium","volume":"20 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"25","resultStr":"{\"title\":\"New SAW Velocity Measurements on Y-Cut LiNbO3\",\"authors\":\"M. Anhorn, H. Engan, A. Rønnekleiv\",\"doi\":\"10.1109/ULTSYM.1987.198969\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Recent measiirements on SAW velocities are reported. The results are based on scanning of a laser probe across the propagation beam at certain intervals. Previously reported measurements on YZ LiNb03 have been extended to include the complete Y surface. For t.his orientation, results for both a free surface and a metallized surface are reported. A noticeable digference has been found between the beam steering properties of free and met.alized surface around Z propagation direction. Effects from va r i a t ion (I) f me t a 1 1 i z a t i on t h i c kne s s have been studied also and are presented. Many SAW devices use parallel metal strips on the substrate surface. Measurements on the angular variation of SAW velocities in such st.ructiires are reported.\",\"PeriodicalId\":309261,\"journal\":{\"name\":\"IEEE 1987 Ultrasonics Symposium\",\"volume\":\"20 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"25\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE 1987 Ultrasonics Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ULTSYM.1987.198969\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE 1987 Ultrasonics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.1987.198969","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Recent measiirements on SAW velocities are reported. The results are based on scanning of a laser probe across the propagation beam at certain intervals. Previously reported measurements on YZ LiNb03 have been extended to include the complete Y surface. For t.his orientation, results for both a free surface and a metallized surface are reported. A noticeable digference has been found between the beam steering properties of free and met.alized surface around Z propagation direction. Effects from va r i a t ion (I) f me t a 1 1 i z a t i on t h i c kne s s have been studied also and are presented. Many SAW devices use parallel metal strips on the substrate surface. Measurements on the angular variation of SAW velocities in such st.ructiires are reported.
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