薄膜化学传感器和生物传感器中的电容检测

ASDAM '98. Conference Proceedings. Second International Conference on Advanced Semiconductor Devices and Microsystems (Cat. No.98EX172) Pub Date : 1998-10-05 DOI:10.1109/ASDAM.1998.730212

V. Rehacek, I. Novotný, V. Tvarozek, M. Riepl, T. Hirsch, M. Mass, R. Schweiss, V. Mirsky, O. Wolfbeis

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引用次数: 2

摘要

硅基底上的薄膜电极芯片已经实现并用于开发不同的化学和生物传感器。这些亲和性传感器以电容转换为基础，其一般结构为薄膜金/乙硫醇/受体。本文介绍了薄膜金电极在电容传感器中的几种应用。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Capacitive detection in thin film chemical sensors and biosensors

Thin film electrode chips on silicon substrate have been realized and utilized in development of different chemo- and biosensors. These affinity sensors are based on capacitive transducing and their general structure is thin film Au/alkanethiol/receptor. Several applications of thin film gold electrodes in capacitive sensors are presented.

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ASDAM '98. Conference Proceedings. Second International Conference on Advanced Semiconductor Devices and Microsystems (Cat. No.98EX172)

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