聚酰亚胺作为批量制造微球透镜和微蘑菇阵列的基座

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI:10.1109/MEMSYS.2001.906547

Yuh-Sheng Lin, C. Pan, K. Lin, Shih-Chou Chen, Jauh-Jung Yang, Jei-Pin Yang

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引用次数: 23

摘要

本文提出了一种制造微球透镜和微蘑菇阵列的创新工艺。新的批量制造思想是一个简单的过程，一个掩模，容易集成在平面衬底。集成微球镜头不再是梦想。在聚酰亚胺基座上对高宽高比光刻胶进行适当的热处理，可以很容易地制造微球透镜和微蘑菇阵列。制作结果表明，回流形状取决于光刻胶图案的直径和高度。讨论了其原理、制作方法和实验结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Polyimide as the pedestal of batch fabricated micro-ball lens and micro-mushroom array

The paper presents an innovative process to fabricate micro-ball lenses and micro-mushroom arrays. The new batch fabrication idea is a simple process with one mask and easily integrated in the planar substrate. The integrated micro-ball lens is no longer a dream. With proper heat treatment of high aspect ratio photoresist on a polyimide pedestal, micro-ball lenses and micro-mushroom arrays are easily fabricated. The fabrication result shows that the reflowed shape depends on the diameter and height of the photoresist pattern. The theory, fabrication and result are discussed.

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来源期刊

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)

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