{"title":"几种非接触式表面轮廓仪的比较","authors":"N. J. Brown, W. Eickelberg","doi":"10.1364/oft.1988.tha1","DOIUrl":null,"url":null,"abstract":"The LLNL, Zygo (mod 5500), WYKO (Topo - 2 D, Topo - 3 D), and Photographic Sciences (MP-2000), non contact optical profilers were compared and found consistent within their common band limits.","PeriodicalId":354934,"journal":{"name":"Optical Fabrication and Testing","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1988-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Some Comparisons of Non Contact Surface Profiling Instruments\",\"authors\":\"N. J. Brown, W. Eickelberg\",\"doi\":\"10.1364/oft.1988.tha1\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The LLNL, Zygo (mod 5500), WYKO (Topo - 2 D, Topo - 3 D), and Photographic Sciences (MP-2000), non contact optical profilers were compared and found consistent within their common band limits.\",\"PeriodicalId\":354934,\"journal\":{\"name\":\"Optical Fabrication and Testing\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1988-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optical Fabrication and Testing\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/oft.1988.tha1\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Fabrication and Testing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/oft.1988.tha1","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Some Comparisons of Non Contact Surface Profiling Instruments
The LLNL, Zygo (mod 5500), WYKO (Topo - 2 D, Topo - 3 D), and Photographic Sciences (MP-2000), non contact optical profilers were compared and found consistent within their common band limits.
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