T. Miani, T. Verdot, A. Berthelot, F. Maspero, A. Koumela, P. Robert, G. Langfelder, J. Arcamone, M. Sansa
{"title":"基于纳米谐振器的加速度计具有大带宽和改进的偏置稳定性","authors":"T. Miani, T. Verdot, A. Berthelot, F. Maspero, A. Koumela, P. Robert, G. Langfelder, J. Arcamone, M. Sansa","doi":"10.1109/INERTIAL53425.2022.9787526","DOIUrl":null,"url":null,"abstract":"Resonant-beam accelerometers based on nanoresonators have demonstrated that reducing the size of the sensing element allows overcoming the sensitivity-bandwidth trade-off [1]. Here we report on an improvement of the performance of such sensors, through an enhancement of the wafer-level packaging (WLP). We perform a study of the different noise sources present in the system, and we show that an improvement of the vacuum level allows overcoming the thermomechanical noise of the proof mass which – so far – limited the previous generation of sensors.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"160 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Nanoresonator-based accelerometer with large bandwidth and improved bias stability\",\"authors\":\"T. Miani, T. Verdot, A. Berthelot, F. Maspero, A. Koumela, P. Robert, G. Langfelder, J. Arcamone, M. Sansa\",\"doi\":\"10.1109/INERTIAL53425.2022.9787526\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Resonant-beam accelerometers based on nanoresonators have demonstrated that reducing the size of the sensing element allows overcoming the sensitivity-bandwidth trade-off [1]. Here we report on an improvement of the performance of such sensors, through an enhancement of the wafer-level packaging (WLP). We perform a study of the different noise sources present in the system, and we show that an improvement of the vacuum level allows overcoming the thermomechanical noise of the proof mass which – so far – limited the previous generation of sensors.\",\"PeriodicalId\":435781,\"journal\":{\"name\":\"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"volume\":\"160 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-05-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/INERTIAL53425.2022.9787526\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INERTIAL53425.2022.9787526","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Nanoresonator-based accelerometer with large bandwidth and improved bias stability
Resonant-beam accelerometers based on nanoresonators have demonstrated that reducing the size of the sensing element allows overcoming the sensitivity-bandwidth trade-off [1]. Here we report on an improvement of the performance of such sensors, through an enhancement of the wafer-level packaging (WLP). We perform a study of the different noise sources present in the system, and we show that an improvement of the vacuum level allows overcoming the thermomechanical noise of the proof mass which – so far – limited the previous generation of sensors.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
