{"title":"MEMS在射频滤波器中的应用:薄膜体声波技术","authors":"R. Aigner","doi":"10.1002/SEUP.200390006","DOIUrl":null,"url":null,"abstract":"RF-MEMS filters will replace conventional filters in mobile communication as they offer better performance at lower cost. Requirements and key performance parameters for filters in next-generation mobile applications are reviewed in detail. The fundamentals of RF-MEMS filters — and in particular thin-film bulk acoustic wave (BAW) filters — are summarized in a comprehensive form. The state-of-the-art in BAW filters and future trends are presented. Supplementary information covers manufacturing and commercialization issues.","PeriodicalId":154848,"journal":{"name":"Sensors Update","volume":"2007 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"46","resultStr":"{\"title\":\"MEMS in RF Filter Applications: Thin‐film Bulk Acoustic Wave Technology\",\"authors\":\"R. Aigner\",\"doi\":\"10.1002/SEUP.200390006\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"RF-MEMS filters will replace conventional filters in mobile communication as they offer better performance at lower cost. Requirements and key performance parameters for filters in next-generation mobile applications are reviewed in detail. The fundamentals of RF-MEMS filters — and in particular thin-film bulk acoustic wave (BAW) filters — are summarized in a comprehensive form. The state-of-the-art in BAW filters and future trends are presented. Supplementary information covers manufacturing and commercialization issues.\",\"PeriodicalId\":154848,\"journal\":{\"name\":\"Sensors Update\",\"volume\":\"2007 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-02-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"46\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Sensors Update\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1002/SEUP.200390006\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors Update","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1002/SEUP.200390006","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
MEMS in RF Filter Applications: Thin‐film Bulk Acoustic Wave Technology
RF-MEMS filters will replace conventional filters in mobile communication as they offer better performance at lower cost. Requirements and key performance parameters for filters in next-generation mobile applications are reviewed in detail. The fundamentals of RF-MEMS filters — and in particular thin-film bulk acoustic wave (BAW) filters — are summarized in a comprehensive form. The state-of-the-art in BAW filters and future trends are presented. Supplementary information covers manufacturing and commercialization issues.
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