mems频率选择表面的开发

M. Safari, C. Shafai, L. Shafai
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引用次数: 3

摘要

提出了一种基于接地面电容负载槽的频率选择曲面。插槽的加载是通过在插槽上制作的MEMS桥来实现的。结果表明,改变电桥的高度会改变系统的电容,从而改变FSS的谐振频率。该器件在带有定制法兰的x波段波导中制造和测试。测量结果表明,谐振频率成功地在8.54 ~ 10.26 GHz范围内变化。模拟的反射系数和实测的反射系数非常吻合。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Development of a MEMS-enabled frequency selective surface
A frequency selective surface (FSS) based on a capacitively loaded slot in a ground plane is presented. The loading of the slot is achieved by using a MEMS bridge fabricated over the slot. It is shown that varying the height of the MEMS bridge changes the capacitance of the system, which in turn changes the resonance frequency of the FSS. The device was fabricated and tested in an X-band waveguide with customized flanges. The measurements showed the resonance frequency successfully varied from 8.54 to 10.26 GHz. The simulated and measured reflection coefficients showed excellent agreement.
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