{"title":"mems频率选择表面的开发","authors":"M. Safari, C. Shafai, L. Shafai","doi":"10.1109/ANTEM.2014.6887759","DOIUrl":null,"url":null,"abstract":"A frequency selective surface (FSS) based on a capacitively loaded slot in a ground plane is presented. The loading of the slot is achieved by using a MEMS bridge fabricated over the slot. It is shown that varying the height of the MEMS bridge changes the capacitance of the system, which in turn changes the resonance frequency of the FSS. The device was fabricated and tested in an X-band waveguide with customized flanges. The measurements showed the resonance frequency successfully varied from 8.54 to 10.26 GHz. The simulated and measured reflection coefficients showed excellent agreement.","PeriodicalId":190987,"journal":{"name":"2014 16th International Symposium on Antenna Technology and Applied Electromagnetics (ANTEM)","volume":"75 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-07-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Development of a MEMS-enabled frequency selective surface\",\"authors\":\"M. Safari, C. Shafai, L. Shafai\",\"doi\":\"10.1109/ANTEM.2014.6887759\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A frequency selective surface (FSS) based on a capacitively loaded slot in a ground plane is presented. The loading of the slot is achieved by using a MEMS bridge fabricated over the slot. It is shown that varying the height of the MEMS bridge changes the capacitance of the system, which in turn changes the resonance frequency of the FSS. The device was fabricated and tested in an X-band waveguide with customized flanges. The measurements showed the resonance frequency successfully varied from 8.54 to 10.26 GHz. The simulated and measured reflection coefficients showed excellent agreement.\",\"PeriodicalId\":190987,\"journal\":{\"name\":\"2014 16th International Symposium on Antenna Technology and Applied Electromagnetics (ANTEM)\",\"volume\":\"75 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-07-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2014 16th International Symposium on Antenna Technology and Applied Electromagnetics (ANTEM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ANTEM.2014.6887759\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 16th International Symposium on Antenna Technology and Applied Electromagnetics (ANTEM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ANTEM.2014.6887759","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Development of a MEMS-enabled frequency selective surface
A frequency selective surface (FSS) based on a capacitively loaded slot in a ground plane is presented. The loading of the slot is achieved by using a MEMS bridge fabricated over the slot. It is shown that varying the height of the MEMS bridge changes the capacitance of the system, which in turn changes the resonance frequency of the FSS. The device was fabricated and tested in an X-band waveguide with customized flanges. The measurements showed the resonance frequency successfully varied from 8.54 to 10.26 GHz. The simulated and measured reflection coefficients showed excellent agreement.