用无水氟化氢测定各种固体表面吸附的水分浓度

International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM Pub Date : 1994-06-21 DOI:10.1109/ISSM.1994.729458

H. Izumi, Y. Nakagawa, S. Miyoshi, T. Ohmi

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引用次数: 0

摘要

本文研究了一种利用无水氟化氢(AHF)溶解吸附在固体表面的水分分子并将其解离成离子的新方法。将吸附在固体表面的水分分子溶解到AHF中，通过测量AHF电导率的变化来确定溶解水分的量。这种新的测量方法使得测量暴露在高湿度大气中的固体表面上的水分分子浓度成为可能。已经发现，在25℃下，大气中固体表面上吸附的水分分子浓度为1%，平衡时为2.5x1016分子/ cm2。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Measurement Of Adsorbed Moisture Concentration On Various Kinds Of Solid Surfaces By Using Anhydrous Hydrogen Fluoride

We have studied a new measurement method of moisture molecule concentrations adsorbed on solid surface by using Anhydrous Hydrogen Fluoride(AHF) that was able to dissolve adsorbed moisture molecules and dissociate them to ions. After adsorbed moisture molecules on solid surface was dissolved into AHF, the amount of dissolved moisture were then determined by measuring the variation of electric conductivity of AHF. This new measurement method made it possible to measure the moisture molecule concentrations adsorbed on solid surfaces exposed to the atmosphere having high moisture concentrations. It has been found that the amount of adsorbed moisture molecule concentrations on solid surfaces in the atmosphere with 1% at 25 C is 2.5x1016 molecules/cm 2 in equilibrium.

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International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM

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