{"title":"基于SrNb/sub x/Ti/sub 1-x/O/sub 3/的薄膜NTC电阻器","authors":"P. Lai, Bin Li, G.Q. Li","doi":"10.1109/HKEDM.1999.836412","DOIUrl":null,"url":null,"abstract":"A novel strontium titanate-niobate (SrNb/sub x/Ti/sub 1-x/O/sub 3/) thin-film NTC (negative temperature coefficient) resistor is fabricated on a SiO/sub 2//Si substrate by rf sputtering technique. The resistance-temperature characteristics reveal that SrNb/sub x/Ti/sub 1-x/O/sub 3/ thin-film resistor has a high sensitivity within 30/spl deg/C/spl sim/400/spl deg/C. Specifically, there is a turning point at 320/spl deg/C, above which the resistance sharply decreases due to ionic conduction. The a.c characteristics are also investigated.","PeriodicalId":342844,"journal":{"name":"Proceedings 1999 IEEE Hong Kong Electron Devices Meeting (Cat. No.99TH8458)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-06-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Thin-film NTC resistor based on SrNb/sub x/Ti/sub 1-x/O/sub 3/\",\"authors\":\"P. Lai, Bin Li, G.Q. Li\",\"doi\":\"10.1109/HKEDM.1999.836412\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A novel strontium titanate-niobate (SrNb/sub x/Ti/sub 1-x/O/sub 3/) thin-film NTC (negative temperature coefficient) resistor is fabricated on a SiO/sub 2//Si substrate by rf sputtering technique. The resistance-temperature characteristics reveal that SrNb/sub x/Ti/sub 1-x/O/sub 3/ thin-film resistor has a high sensitivity within 30/spl deg/C/spl sim/400/spl deg/C. Specifically, there is a turning point at 320/spl deg/C, above which the resistance sharply decreases due to ionic conduction. The a.c characteristics are also investigated.\",\"PeriodicalId\":342844,\"journal\":{\"name\":\"Proceedings 1999 IEEE Hong Kong Electron Devices Meeting (Cat. No.99TH8458)\",\"volume\":\"15 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-06-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings 1999 IEEE Hong Kong Electron Devices Meeting (Cat. No.99TH8458)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/HKEDM.1999.836412\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings 1999 IEEE Hong Kong Electron Devices Meeting (Cat. No.99TH8458)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/HKEDM.1999.836412","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Thin-film NTC resistor based on SrNb/sub x/Ti/sub 1-x/O/sub 3/
A novel strontium titanate-niobate (SrNb/sub x/Ti/sub 1-x/O/sub 3/) thin-film NTC (negative temperature coefficient) resistor is fabricated on a SiO/sub 2//Si substrate by rf sputtering technique. The resistance-temperature characteristics reveal that SrNb/sub x/Ti/sub 1-x/O/sub 3/ thin-film resistor has a high sensitivity within 30/spl deg/C/spl sim/400/spl deg/C. Specifically, there is a turning point at 320/spl deg/C, above which the resistance sharply decreases due to ionic conduction. The a.c characteristics are also investigated.
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