MEMS的应用

{"title":"MEMS的应用","authors":"A. Luque, J. Quero, R. Lempkowski, Francisco Ibáñez","doi":"10.1201/B10602-18","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":354437,"journal":{"name":"Fundamentals of Industrial Electronics","volume":"44 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-03-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Applications of MEMS\",\"authors\":\"A. Luque, J. Quero, R. Lempkowski, Francisco Ibáñez\",\"doi\":\"10.1201/B10602-18\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":354437,\"journal\":{\"name\":\"Fundamentals of Industrial Electronics\",\"volume\":\"44 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-03-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Fundamentals of Industrial Electronics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1201/B10602-18\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Fundamentals of Industrial Electronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1201/B10602-18","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}