{"title":"层合薄板扩散键合制备94GHz开槽波导阵列天线","authors":"J. Hirokawa, Miao Zhang, M. Ando","doi":"10.1109/ICSENS.2009.5398159","DOIUrl":null,"url":null,"abstract":"We fabricate the single-layer slotted waveguide array antenna in 94GHz band by diffusion bonding of laminated thin metal plates. This new fabrication technique is a promising one of low cost, because of the high-precision etching in low price. Perfect electric connection can be realized between the slotted plate and the grooved waveguide base by diffusion bonding even at a high frequency such as 94GHz. A designed 18×18-element antenna is trial fabricated by using copper. The antenna efficiency is achieved at 60% for 31.4dBi gain at 93.7GHz in this copper antenna. The process of diffusion bonding using copper could result in over-etching of the slots by 50um, which degrades the aperture efficiency by 0.8dB.","PeriodicalId":262591,"journal":{"name":"2009 IEEE Sensors","volume":"9 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"17","resultStr":"{\"title\":\"94GHz fabrication of a slotted waveguide array antenna by diffusion bonding of laminated thin plates\",\"authors\":\"J. Hirokawa, Miao Zhang, M. Ando\",\"doi\":\"10.1109/ICSENS.2009.5398159\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We fabricate the single-layer slotted waveguide array antenna in 94GHz band by diffusion bonding of laminated thin metal plates. This new fabrication technique is a promising one of low cost, because of the high-precision etching in low price. Perfect electric connection can be realized between the slotted plate and the grooved waveguide base by diffusion bonding even at a high frequency such as 94GHz. A designed 18×18-element antenna is trial fabricated by using copper. The antenna efficiency is achieved at 60% for 31.4dBi gain at 93.7GHz in this copper antenna. The process of diffusion bonding using copper could result in over-etching of the slots by 50um, which degrades the aperture efficiency by 0.8dB.\",\"PeriodicalId\":262591,\"journal\":{\"name\":\"2009 IEEE Sensors\",\"volume\":\"9 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"17\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2009 IEEE Sensors\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2009.5398159\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 IEEE Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2009.5398159","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
94GHz fabrication of a slotted waveguide array antenna by diffusion bonding of laminated thin plates
We fabricate the single-layer slotted waveguide array antenna in 94GHz band by diffusion bonding of laminated thin metal plates. This new fabrication technique is a promising one of low cost, because of the high-precision etching in low price. Perfect electric connection can be realized between the slotted plate and the grooved waveguide base by diffusion bonding even at a high frequency such as 94GHz. A designed 18×18-element antenna is trial fabricated by using copper. The antenna efficiency is achieved at 60% for 31.4dBi gain at 93.7GHz in this copper antenna. The process of diffusion bonding using copper could result in over-etching of the slots by 50um, which degrades the aperture efficiency by 0.8dB.
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