硅单晶仍是王者

{"title":"硅单晶仍是王者","authors":"","doi":"10.1201/9781315274164-8","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"78 2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Silicon Single Crystal Is Still King\",\"authors\":\"\",\"doi\":\"10.1201/9781315274164-8\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":288278,\"journal\":{\"name\":\"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set\",\"volume\":\"78 2 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-12-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1201/9781315274164-8\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1201/9781315274164-8","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}