多晶硅纳米线偏置非线性电特性及液体栅极生物传感应用评估

Tanvir Alam Shifat, Rubiya Nila, Muktadir Imam Jan, M. Hakim
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引用次数: 0

摘要

我们研究了多晶硅纳米线电特性的偏置依赖性调制,并进行了多晶硅纳米线用于液体栅极布置生物传感应用的可行性研究。研究了掺杂密度为1016/cm3、厚度为100 nm、长度为10 μ m的p型多晶硅纳米线的电学特性。对于正漏极电压的应用,纳米线的输出特性表现出非线性二极管的特性,而对于负漏极电压的应用,纳米线的输出特性表现出完美的晶体管特性和饱和特性。虽然纳米线的输出特性随着漏极偏置极性的变化而发生了巨大的变化,但其亚阈值特性在正、负漏极偏置应用中都表现出优异的性能,其亚阈值斜率为102.61 mv/decade,这意味着多晶硅纳米线是生物传感操作的理想选择,可实现800%左右的灵敏度。研究还发现,对于正漏极电压,亚阈值特性随着漏极偏置的变化而变化,为生理活动监测提供了大范围液体门控电压的灵活性。对于负漏极电压,亚阈值特性不会移位,从而限制了生物传感器灵敏操作的适用液门电压。因此,本研究揭示了10µm长100 nm厚低掺杂p型多晶硅纳米线生物传感器生理过程监测的适用偏压条件和可实现的生物标志物检测的最大灵敏度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Bias dependent non-linear electrical characteristics of poly-silicon nanowire and assessment of biosensing application using liquid gate
We investigate the bias dependent modulation of the electrical characteristics of poly-silicon nanowire and perform a feasibility study of poly-silicon nanowire for biosensing application using liquid gate arrangement. Electrical characteristics of a 100 nm thick and 10 µm long p-type poly-silicon nanowire with a doping density of 1016/cm3 is investigated. For positive drain voltage application nanowire's output characteristics exhibit a non-linear diode like behavior whereas for negative drain voltages output characteristics exhibit a perfect transistor behavior with saturation in the characteristics. While nanowire's output characteristics reveal quite a drastic change with drain bias polarity, the sub-threshold characteristics exhibit excellent behavior for both positive and negative drain bias application with a sub-threshold slope of 102.61 mv/decade implying that poly silicon nanowire is good candidate for bio sensing operation with an achievable sensitivity around 800%. It is also found that for positive drain voltages sub-threshold characteristics shifts with the change in drain bias providing the flexibility of a wide range of liquid gated voltages for physiological activity monitoring. For negative drain voltages sub-threshold characteristics does not shift thereby restricting the applicable liquid gate voltages for sensitive operation of biosensors. As such, this study reveals the applicable bias conditions of a 10 µm long 100 nm thick low doped p-type poly-silicon nanowire biosensors physiological process monitoring and the maximum achievable sensitivity for detection of biomarkers.
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